Ojiji tungsten hexafluoride (WF6)

A na-edobe Tungsten hexafluoride (WF6) n'elu wafer site na usoro CVD, na-ejuputa njikọ njikọ ígwè, na-eme ka njikọ ígwè dị n'etiti ọkwa.

Ka anyị buru ụzọ kwuo maka plasma.Plasma bụ ụdị okwu mebere nke eletrọn efu na ion chaja.Ọ dị n'ọtụtụ ebe na mbara igwe ma a na-ewerekarị ya dị ka ọnọdụ nke anọ.A na-akpọ ya steeti plasma, nke a na-akpọkwa "Plasma".Plasma nwere ụkpụrụ eletrik dị elu ma nwee mmetụta njikọ siri ike na mpaghara electromagnetic.Ọ bụ gas nke nwere akụkụ ionized, nke electrons, ion, free radicals, particles nọpụ iche, na photons mejupụtara.Plasma n'onwe ya bụ ngwakọta na-anọpụ iche na eletrik nwere ihe na-arụ ọrụ anụ ahụ na nke kemịkalụ.

Nkọwa doro anya bụ na n'okpuru ọrụ nke ike dị elu, molekul ga-emeri ike van der Waals, ike njikọ kemịkalụ na ike Coulomb, ma gosipụta ụdị ọkụ eletrik na-anọpụ iche n'ozuzu ya.N'otu oge ahụ, ike dị elu na-enye n'èzí na-emeri ike atọ dị n'elu.Ọrụ, eletrọn na ion na-enye steeti efu, nke enwere ike iji ya mee ihe n'ụdị ngbanwe nke oghere magnetik, dị ka usoro etching semiconductor, usoro CVD, PVD na usoro IMP.

Kedu ihe bụ ike dị elu?Na tiori, enwere ike iji ma oke okpomọkụ yana RF dị elu.N'ikwu okwu n'ozuzu, oke okpomọkụ fọrọ nke nta ka ọ gaghị ekwe omume nweta.Ọnọdụ okpomọkụ a chọrọ dị oke elu ma nwee ike ịdị nso na okpomọkụ anyanwụ.Ọ bụ ihe na-agaghị ekwe omume imezu na usoro a.Ya mere, ụlọ ọrụ ahụ na-ejikarị RF dị elu eme ihe iji nweta ya.Plasma RF nwere ike iru ihe ruru 13MHz+.

Tungsten hexafluoride na-eme ka plasma dị n'okpuru arụ ọrụ nke mpaghara eletriki, wee tinye ya na ikuku magnet.W atọm yiri oyi ọgazị feathers na-ada n'ala n'okpuru omume nke ike ndọda.Nwayọọ nwayọọ, a na-edobe atọm W n'ime oghere, ma n'ikpeazụ jupụta zuru oke site na oghere iji mepụta njikọ nke igwe.Na mgbakwunye na itinye W atọm n'ime oghere, a ga-edobekwa ha n'elu Wafer?Ee, n'ezie.N'ikwu okwu n'ozuzu, ị nwere ike iji usoro W-CMP, nke bụ ihe anyị na-akpọ usoro ịme ihe iji wepụ.Ọ dị ka iji broom na-asachapụ ala mgbe nnukwu snow gasịrị.A na-ekpochapụ snow dị n'ala, ma snow nke dị na oghere dị n'ala ga-anọgide.N'ala, ihe dị ka otu.