Silane (SiH4)

Nkọwa dị mkpirikpi:

Silane SiH4 bụ gas na-enweghị agba, na-egbu egbu ma na-arụsi ọrụ ike na okpomọkụ na nrụgide nkịtị. A na-eji Silane eme ihe n'ọtụtụ ebe na uto epitaxial nke silicon, akụrụngwa maka polysilicon, silicon oxide, silicon nitride, wdg, sel anyanwụ, eriri anya, imepụta iko agba agba, na ntinye kemịkalụ.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Nka nka

Akụkụ

99.9999%

Nkeji

Oxygen (Ar)

≤0.1

ppmV

Nitrogen

≤0.1

ppmV

Hydrogen

≤20

ppmV

Helium

≤10

ppmV

CO+CO2

≤0.1

ppmV

THC

≤0.1

ppmV

Chlorosisi

≤0.1

ppmV

Disiloxane

≤0.1

ppmV

Kwụsị

≤0.1

ppmV

Mmiri (H2O)

≤0.1

ppmV

Silane bụ ngwakọta nke silicon na hydrogen. Ọ bụ okwu n'ozuzu maka usoro nke ogige, gụnyere monosilane (SiH4), disilane (Si2H6) na ụfọdụ ogige silicon-hydrogen dị elu. N'ime ha, monosilane bụ ihe a na-ahụkarị, mgbe ụfọdụ a na-akpọ silane maka mkpụmkpụ. Silane bụ gas na-enweghị agba nke nwere isi galik na-asọ oyi. Na-agbaze n'ime mmiri, ọ fọrọ nke nta ka ọ ghara ịsacha ya na ethanol, ether, benzene, chloroform, silicon chloroform na silicon tetrachloride. Njirimara kemịkalụ nke silanes na-arụsi ọrụ ike karịa alkanes ma na-adị mfe oxidized. Ọkụ ọkụ nwere ike ime mgbe ikuku na-akpakọrịta. Ọ naghị emeghachi omume na nitrogen dị n'okpuru 25 Celsius, ọ dịghịkwa emeghachi omume na ogige hydrocarbon na okpomọkụ nke ụlọ. Ọkụ na mgbawa nke silane bụ nsonaazụ mmeghachi omume na oxygen. Silane na-enwe mmetụta nke ukwuu maka ikuku oxygen na ikuku. Silane nwere ụfọdụ itinye uche ga-emekwa ihe mgbawa na oxygen na okpomọkụ nke -180°C. Silane aghọwo gas pụrụ iche kachasị mkpa nke a na-eji na semiconductor microelectronics usoro, a na-ejikwa ya na nkwadebe nke ihe nkiri microelectronic dị iche iche, gụnyere otu ihe nkiri kristal, microcrystalline, polycrystalline, silicon oxide, silicon nitride, na metal silicides. Ngwa microelectronic nke silane ka na-etolite na omimi: epitaxy na-ekpo ọkụ dị ala, nke na-ahọrọ, na heteroepitaxial epitaxy. Ọ bụghị naanị maka ngwaọrụ silicon na sekit agbakwunyere silicon, kamakwa maka ngwaọrụ semiconductor mejupụtara (gallium arsenide, silicon carbide, wdg). Ọ nwekwara ngwa na nkwadebe nke superlatice quantum olulu mmiri. Enwere ike ịsị na a na-eji silane mee ihe n'ihe fọrọ nke nta ka ọ bụrụ ahịrị mmepụta sekit niile jikọtara ọnụ n'oge a. Ngwa nke silane dị ka ihe nkiri nke nwere silicon na mkpuchi agbasawo site na ụlọ ọrụ microelectronics ọdịnala na mpaghara dị iche iche dị ka ígwè, igwe, kemịkalụ na optics. Ngwa ọzọ nke silane nwere ike ime bụ imepụta akụkụ engine seramiiki dị elu, karịsịa iji silane na-emepụta silicide (Si3N4, SiC, wdg) nkà na ụzụ micropowder adọtala nlebara anya karị.

Ngwa:

Eletrọnịkị:

A na-etinye Silane n'ígwé silicon polycrystalline na wafer silicon mgbe a na-emepụta semiconductor, na sealants.

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② Anyanwụ:

A na-eji Silane na-emepụta modul fotovoltaic nke anyanwụ.

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Ụlọ ọrụ mmepụta ihe:

A na-eji ya na Green Glass na-echekwa ike ma tinye ya na ntinye ihe nkiri dị mkpa.

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Ngwungwu nkịtị:

Ngwaahịa

Silane SiH4 Liquid

Nha ngwugwu

47Ltr Silinder

Y-440L

Na-ejuputa Net arọ/Cyl

10kgs

125kgs

Ebuuru QTY n'ime akpa 20'

250 Cyl

8 Cyls

Mkpokọta ibu Netwọk

2.5 Tọn

1 ton

Cylinder Tare Ibu

52kgs

680kg

Valve

CGA632/DISS632

Uru:

① Ihe karịrị afọ iri na ahịa;

② onye nrụpụta akwụkwọ ISO;

③Nfefe ngwa ngwa;

④ Isi iyi akụrụngwa siri ike;

⑤ Usoro nyocha nke ntanetị maka njikwa mma na usoro ọ bụla;

⑥ High chọrọ na usoro nlezianya maka ijikwa cylinder tupu ejuputa;

⑦ Ịdị ọcha: ọkwa eletrik dị elu dị elu;

⑧ Ihe eji eme ihe: ihe ndi ozo; na-eme ka polysilicon dị ọcha, silicon oxide na eriri anya; imepụta iko acha.


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