Ahụmịhe ndị bara ụba nke ọrụ nchịkwa na ụdị ọrụ mmadụ na otu na-eme ka nkwukọrịta nzukọ dị mkpa na nghọta dị mfe nke atụmanya gị maka Onye Na-ebunye A Pụrụ Ịtụkwasị Obi Dị Mma Dị Elu Dị Ọcha Excimer Laser Gas Premix Gas Arf (193 nm), Krf (248 nm), Xecl (308 nm), Xef (450-520 nm) 16L/20L/47L Cylinder, Ugbu a anyị nwere ihe anọ na-eduga. A na-ere ngwa ahịa anyị ọ bụghị naanị n'ahịa China ugbu a, kamakwa a na-anabata ha n'ahịa mba ụwa.
Ahụmịhe nchịkwa ọrụ bara ụba nke ukwuu na ụdị ọrụ mmadụ na otu na-eme ka nkwukọrịta ụlọ ọrụ dị mkpa yana nghọta dị mfe anyị banyere atụmanya gị makaGas Laser na Excimer nke China, Site na ahụmịhe azụmaahịa ihe fọrọ nke nta ka ọ bụrụ afọ 30, anyị nwere obi ike na ọrụ dị elu, ịdị mma na nnyefe dị elu. Anyị na-anabata ndị ahịa si n'akụkụ ụwa niile nke ọma ka ha soro ụlọ ọrụ anyị rụkọọ ọrụ maka mmepe ọnụ.
A na-eji gas niile arụ ọrụ dị ka ihe e ji laser mee, nke a na-akpọ laser gas. Ọ bụ ụdị kachasị n'ụwa, na-emepụta laser kachasị ngwa ngwa, nke a na-eji n'ọtụtụ. Otu n'ime ihe ndị kacha mkpa e ji mara gas laser bụ ihe e ji laser arụ ọrụ bụ gas ngwakọta ma ọ bụ otu gas dị ọcha.
Ihe na-arụ ọrụ nke gas laser ji eme ihe nwere ike ịbụ atomik gas, molekul gas, ionized ion gas na metal vapor, wdg, yabụ enwere ike ịkpọ ya atomik laser gas (dịka helium-neon laser) na molekul laser gas (dịka carbon dioxide). Laser), ion laser gas (dịka argon laser), metal vapor laser (dịka copper vapor laser). N'ikwu ya n'ozuzu, n'ihi njirimara dị n'ime gas laser, enwere ụfọdụ njirimara sitere na ya; uru ndị dị na ya bụ: a na-ekesa molekul gas ahụ n'otu aka ahụ na ọkwa ike dị mfe, yabụ ịdị mma nke gas laser ahụ dị otu ma jikọta ọnụ. Ka mma; Na mgbakwunye, molekul gas na-eme ka ọ na-agagharị ngwa ngwa, ọ dịkwa mfe ịjụ oyi. Otu n'ime njirimara kachasị mkpa nke gas laser bụ na ihe na-arụ ọrụ laser bụ gas agwakọtara ma ọ bụ otu gas dị ọcha. Ịdị ọcha nke gas component dị na laser gwakọtara gas na-emetụta arụmọrụ nke laser ozugbo. Karịsịa, ọnụnọ nke ihe ndị na-adịghị ọcha dị ka oxygen, mmiri, na hydrocarbons n'ime gas ahụ ga-eme ka ike mmepụta laser ahụ funahụ na enyo (elu) na electrode, ma meekwa ka laser ahụ ghara ịdị irè. Otu n'ime njirimara dị mkpa nke gas laser gas, ihe na-arụ ọrụ nke laser ahụ bụ gas agwakọtara ma ọ bụ otu gas dị ọcha. Ya mere, enwere ihe pụrụ iche achọrọ maka ịdị ọcha nke ihe ndị mejupụtara gas agwakọtara laser. A ga-akpọkwa silinda maka ịkwakọba gas agwakọtara tupu e jupụta ya iji gbochie mmetọ gas agwakọtara. Ọ bụrụ na ejiri laser helium (He) neon (Ne) mee ihe dị ka laser gas ọgbọ mbụ, na laser carbon dioxide bụ laser gas ọgbọ nke abụọ, enwere ike ịkpọ laser krypton fluoride (KrF) nke a ga-eji mee ihe nke ukwuu na ngalaba mmepụta semiconductor, laser ọgbọ nke atọ. A na-eji ngwakọta gas laser eme ihe na mmepụta ụlọ ọrụ mmepụta ihe, nchọpụta sayensị na owuwu nchekwa mba, ịwa ahụ ahụike na mpaghara ndị ọzọ.
| Nkewa | Akụkụ (%) | Gas Nhazi |
| Gas Ngwakọta Laser He-Ne | 2~8.3 Ne | He |
| CO2 Laser Ngwakọta Gas | 0.4H2+ 13.5CO2+ 4.5Kr | / |
| 0.4 H2+ 13CO2+ 7Kr+ 2CO | ||
| 0.4 H2+ 8CO2+ 8Kr+ 4CO | ||
| 0.4 H2+ 6CO2+ 8Kr+ 2CO | ||
| 0.4 H2+ 16CO2+ 16Kr+ 4CO | ||
| 0.4 H2+ 8~12CO2+ 8~12Kr | ||
| Ngwakọta Gas Laser Kr-F2 | 5 Kr+ 10 F2 | / |
| 5Kr+ 1~0.2 F2 | ||
| Gas Laser nke a Kpuchiri Emechi | 18.5N2+ 3Xe+ 2.5CO | / |
| Laser Excimer | 25.8Ne+ 9.8Ar+ 0.004N2+ 1F2 | Ar |
| 25.8Ne+ 9.8Ar+ 0.004N2+ 5F2 | He | |
| 25.8Ne+ 9.8Ar+ 0.004N2+ 0.2F2 | He | |
| 25.8Ne+ 9.8Ar+ 0.004N2+ 5HCl | Ar |
①Mmepụta Ọrụ Ugbo Ụlọ Ọrụ:
A na-ejikarị ya eme ihe n'ihe gbasara mmepụta ugbo ụlọ ọrụ mmepụta ihe, nnyocha sayensị na nchekwa mba.
② Ịwa Ahụ́ Ike:
A na-eji ya maka ịwa ahụ ahụike.
③ Nhazi Laser:
A na-eji ya eme ihe maka nhazi laser, dịka ịkpụ seramiiki ígwè, ịgbado ọkụ na igwu ala.
Oge nnyefe: ụbọchị ọrụ 15-30 mgbe e mechara nnata ego ahụ
Ngwugwu ọkọlọtọ: silinda 10L, 47L ma ọ bụ 50L.
①Ịdị ọcha dị elu, ụlọ ọrụ kachasị ọhụrụ;
②Onye nrụpụta asambodo ISO;
③Nnyefe ngwa ngwa;
④ Sistemụ nyocha n'ịntanetị maka njikwa mma na nzọụkwụ ọ bụla;
⑤Nchọ dị elu na usoro nlezianya maka ijikwa silinda tupu ejuputa ya;