Octafluorocyclobutane (C4F8)

Nkọwa dị mkpirikpi:

Octafluorocyclobutane C4F8, gas dị ọcha: 99.999%, nke a na-ejikarị dị ka nri aerosol propellant na ọkara gas. A na-ejikarị ya eme ihe na semiconductor PECVD (Plasma Enhance. Chemical Vapor deposition), C4F8 na-eji dochie anya CF4 ma ọ bụ C2F6, na-eji dị ka ihicha gas na semiconductor usoro etching gas.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Nka nka

Ihe

 

 

Octafluorocyclobutaneọdịnaya

≥99.999

≥99.90

Oxygen

≤5ppm

≤0.0020%

Mmiri

≤2pm

≤0.0020%

Octafluorocyclobutanebụ ihe kemịkalụ, ihe na-esi na cyclobutane pụta, na usoro kemịkal ya bụ C4F8. Enweghị agba, enweghị isi, gas anaghị ere ọkụ. Kwụsie ike na ọdịdị na-adịghị egbu egbu. Ọ bụrụ na oke okpomọkụ dị elu, nrụgide dị n'ime nke akpa ahụ ga-abawanye, a ga-enwekwa ihe ize ndụ nke mgbawa na mgbawa. Ngwaahịa combustion (decomposition) bụ hydrogen fluoride. Octafluorocyclobutane kwụsiri ike ma ghara imeghachi omume na ihe ndị ọzọ n'okpuru ọnọdụ nkịtị. Enwere ike iji ígwè nkedo na igwe anaghị agba nchara mee ihe nchekwa na ihe mmeghachi omume na 120ºC, a pụkwara iji ígwè mee ihe na 175 Celsius. Mgbe ọ gafere 400°C, ihe Inconel dị ka, nickel na platinum nwekwara ike mebie ntakịrị. Na 500 Celsius C, ihe ndị a na-enwe mmetụta catalytic na ire ere. Na okpomọkụ dị elu (600 Celsius C), octafluorocyclobutane nwere ike decompose n'ime carbon, carbon tetrafluoride na ogige ndị na-egbu egbu. Octafluorocyclobutane nwere ọtụtụ ngwa ngwa. N'afọ ndị na-adịbeghị anya, a na-eji ya eme ihe n'ọtụtụ ebe dị ka friji iji dochie ogige chlorofluorocarbon amachibidoro. Na mgbakwunye, a na-ejikwa ya na mgbasa ozi mkpuchi gas, ihe mgbaze, sprays, ndị na-afụ ụfụfụ, na etchants sekit buru ibu. , Igwe ọkụ ọkụ na-arụ ọrụ mmiri na akụrụngwa maka mmepụta nke C2F4 na C3F6 monomers. A na-eji octafluorocyclobutane dị elu dị ọcha (n'elu 5N) dị ka onye na-ahụ maka etching na ihe nhicha maka sekit VLSI. N'ihi ihe ndị siri ike ya, ndị na-adịghị egbu egbu, zero ozone depletion potential (ODP), na mkpuchi dị mma, octafluorocyclobutane ejiriwo ya mee ihe n'ọtụtụ ebe na nkà na ụzụ dị ka ihe mkpuchi voltaji dị elu, nhicha na etching, na ọgwụgwọ plasma n'afọ ndị na-adịbeghị anya. Nzaghachi mberede maka ntapu: yiri ngwa iku ume nke nwere onwe yana uwe ọrụ. Bipụ isi iyi gas. Igwe ikuku na convection, dilution na mgbasa. Bugharịa akpa ahụ na-agbapụta n'ebe a na-emeghe ma ṅaa ntị na ikuku ikuku. Enwekwaghị ike iji igbe na-agbapụta ihe, na a ga-enwerịrị ọgwụgwọ teknụzụ iji wepụ gas fọdụrụnụ.

Ngwa:

Ụlọ ọrụ nri:

A na-ejikarị ya dị ka onye na-agba mmiri na ụlọ ọrụ nri, refrigerant.

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Ụlọ ọrụ eletrọnịkị:

enchant maka sekit agbakwunyere, a na-ejikwa ya dị ka ngwakọta dielectric na sf6, yana enyemaka polymerization maka ngwakọta fluorinated.

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Ngwungwu nkịtị:

Ngwaahịa

C4F8-Octafluorocyclobutane

Nha ngwugwu

47Ltr Silinder

926 lita cylinder

Na-ejuputa Net arọ/Cyl

45kgs

1000kgs

Ebuuru QTY n'ime akpa 20'

250 Cyl

14 Cyls

Mkpokọta ibu Netwọk

11.25 tọn

tọn 14

Cylinder Tare Ibu

50kgs

500kgs

Valve

DISS716

Uru:

① Ihe karịrị afọ iri na ahịa;

② onye nrụpụta akwụkwọ ISO;

③Nfefe ngwa ngwa;

④ Isi iyi akụrụngwa siri ike;

⑤ Usoro nyocha nke ntanetị maka njikwa mma na usoro ọ bụla;

⑥ High chọrọ na usoro nlezianya maka ijikwa cylinder tupu ejuputa;


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