Teknụzụ ịkpụcha akọrọ bụ otu n'ime usoro dị mkpa. Gas ịkpụcha akọrọ bụ ihe dị mkpa na mmepụta semiconductor na isi iyi gas dị mkpa maka ịkpụcha akọrọ plasma. Arụmọrụ ya na-emetụta kpọmkwem mma na arụmọrụ nke ngwaahịa ikpeazụ. Isiokwu a na-akọwakarị ihe bụ gas ịkpụcha a na-ejikarị eme ihe n'usoro ịkpụcha akọrọ.
Gas ndị dabere na fluorine: dịkacarbon tetrafluoride (CF4), hexafluoroethane (C2F6), trifluoromethane (CHF3) na perfluoropropane (C3F8). Gas ndị a nwere ike ịmepụta fluoride na-agbanwe agbanwe nke ọma mgbe ha na-akụ silicon na silicon, si otú a na-ewepụ ihe.
Gas ndị dabere na chlorine: dịka chlorine (Cl2),boron trichloride (BCl3)na silicon tetrachloride (SiCl4). Gas ndị dabere na chlorine nwere ike inye ion chloride n'oge usoro ịkpụcha ihe, nke na-enyere aka ime ka ọsọ ịkpụcha ihe na nhọrọ dịkwuo mma.
Gas ndị sitere na bromine: dịka bromine (Br2) na bromine iodide (IBr). Gas ndị sitere na bromine nwere ike inye arụmọrụ ka mma n'usoro ịkpụcha ụfọdụ, ọkachasị mgbe a na-akụ ihe siri ike dịka silicon carbide.
Gas ndị dabere na Nitrogen na oxygen: dịka nitrogen trifluoride (NF3) na oxygen (O2). A na-ejikarị gas ndị a emezi ọnọdụ mmeghachi omume n'usoro ịkpụcha ihe iji melite nhọrọ na ntụzịaka nke ịkpụcha ihe.
Gas ndị a na-enweta ntuputa ziri ezi nke elu ihe ahụ site na njikọta nke ntuputa anụ ahụ na mmeghachi omume kemịkalụ n'oge ntuputa plasma. Nhọrọ nke ikuku ntuputa dabere na ụdị ihe a ga-egweri, ihe achọrọ maka nhọrọ nke ntuputa, na ọnụego ntuputa achọrọ.
Oge ozi: Feb-08-2025
