Ọrụ nke sọlfọ hexafluoride na nhazi silicon nitride

Sulfur hexafluoride bụ gas nwere ezigbo ihe mkpuchi ma a na-ejikarị ya eme ihe na ihe ndị na-eme ka ọkụ eletrik dị elu na ihe ndị na-agbanwe agbanwe, eriri nnyefe voltaji dị elu, ihe ndị na-agbanwe agbanwe, wdg. Agbanyeghị, na mgbakwunye na ọrụ ndị a, enwere ike iji sulfur hexafluoride dị ka ihe na-eme ka ọkụ eletrik dị elu. Sulfur hexafluoride dị ọcha nke eletrọniki bụ ihe na-eme ka ọkụ eletrik dị mma, nke a na-ejikarị eme ihe n'ọhịa nke teknụzụ microelectronics. Taa, onye nchịkọta akụkọ gas pụrụ iche Niu Ruide Yueyue ga-ewebata ojiji nke sulfur hexafluoride na ihe na-eme ka ọkụ silicon nitride dị na mmetụta nke paramita dị iche iche.

Anyị na-atụle usoro SiNx nke itinye plasma SF6, gụnyere ịgbanwe ike plasma, oke gas nke SF6/He na ịgbakwunye gas cationic O2, na-atụle mmetụta ya na ọnụego ntinye nke oyi akwa nchekwa ihe SiNx nke TFT, na iji radieshon plasma. Spectrometer na-enyocha mgbanwe ntinye nke ụdị ọ bụla na plasma SF6/He, SF6/He/O2 na ọnụego nkewa SF6, ma na-enyocha mmekọrịta dị n'etiti mgbanwe nke ọnụego ntinye SiNx na ntinye nke ụdị plasma.

Nnyocha achọpụtala na mgbe ike plasma mụbara, ọnụego mgbawa ahụ na-abawanye; ọ bụrụ na ọ̀tụ̀tụ̀ mmụba nke SF6 na plasma mụbaa, njupụta atọm F na-abawanye ma na-ejikọta ya na ọnụego mgbawa ahụ. Na mgbakwunye, mgbe etinyere gas cationic O2 n'okpuru ọnụego mmụba a kapịrị ọnụ, ọ ga-enwe mmetụta nke ịbawanye ọnụego mgbawa ahụ, mana n'okpuru oke mmụba O2/SF6 dị iche iche, a ga-enwe usoro mmeghachi omume dị iche iche, nke enwere ike kewaa n'ime akụkụ atọ: (1) Oke mmụba O2/SF6 dị obere nke ukwuu, O2 nwere ike inyere aka na nkewa nke SF6, ọnụego mgbawa ahụ n'oge a karịrị mgbe a naghị etinye O2. (2) Mgbe oke mmụba O2/SF6 karịrị 0.2 ruo oge na-eru nso 1, n'oge a, n'ihi nnukwu oke nkewa nke SF6 iji mepụta atọm F, ọnụego mgbawa ahụ bụ nke kachasị elu; mana n'otu oge ahụ, atọm O dị na plasma na-amụbakwa, ọ dịkwa mfe ịmepụta SiOx ma ọ bụ SiNxO(yx) na elu ihe nkiri SiNx, ka atọm O na-amụbakwa, otú ahụ ka atọm F ga-esi sie ike maka mmeghachi omume etching. Ya mere, ọnụego etching na-amalite ibelata mgbe oke O2/SF6 dị nso na 1. (3) Mgbe oke O2/SF6 karịrị 1, ọnụego etching na-ebelata. N'ihi mmụba dị ukwuu na O2, atọm F kewara ekewa na-adakọ na O2 na ụdị OF, nke na-ebelata njupụta nke atọm F, na-ebute mbelata na ọnụego etching. Enwere ike ịhụ site na nke a na mgbe etinyere O2, oke mmiri nke O2/SF6 dị n'etiti 0.2 na 0.8, enwere ike nweta ọnụego etching kacha mma.