Gas kachasị pụrụ iche - nitrogen trifluoride

Ifufe na-ahụkarị - na-enwe gas pụrụ iche gụnyeresulfur hexafluoride (sf6), Tursten Hexafluride (wf6),carbon tetrafluoride (cf4), TrifluouroMane (CHF3), nitrogen trifluoride (NF3), hexafluooatane (c2F6) na octafluoropane (c3F8).

Site na mmepe nke Nanotechnology na nnukwu mmepe nke ụlọ ọrụ elektrọnik, ihe ọ ga-eme kwa ụbọchị. Nitrogen trifluoride, dị ka ihe dị mkpa na mmanụ pụrụ iche na nke na-arụ ọrụ na mmepụta na nhazi nke ogwe na semiconductor, nwere ohere ahịa sara mbara.

Dị ka ụdị nke nwere ọkụ pụrụ iche,nitrogen trifluoride (NF3)bụ ngwaahịa elektrik pụrụ iche nke nwere ikike ahịa kachasị ukwuu ahịa. Ọ bụ kemịkal na ụlọ okpomọkụ, na-arụ ọrụ karịa oxygen na okpomọkụ dị elu, kwụsie ike karịa fluorine, ma dịkwa mfe. A na-eji nitrogen trifluoride bụ plasma etchma etchma etchlaị na nnọchi anya mmeghachi omume, ọ dịkwa mma maka ubi semiconductor, na-egosiputa ọgbụgba na-emepụta ihe na-emepụta ihe na-emepụta ihe na-emepụta ihe na-emepụta ihe, igwe elektrọic, wdg photovovoctatic, wdg Photovovtatic, wdg Photovovovtatic, wdg Photovovtatic.

E jiri ya tụnyere igwe eletriki ndị ọzọ,nitrogen trifluorideNwere uru mmeghachi omume dị ngwa na arụmọrụ dị oke. Karịsịa na etchigh-nwere ihe ndị dị ka silicon nitride, ọ nwere ọnụego na nhọrọ, na-ahapụ adịghị n'elu ihe etched. Ọ bụkwa onye dị ezigbo mma na-arụ ọrụ na enweghị mmetọ dị n'elu elu, nke nwere ike igbo mkpa nke usoro nhazi.