Gas pụrụ iche eletrọniki kachasị eji eme ihe - nitrogen trifluoride

Gas eletriki pụrụ iche nke nwere fluorine gụnyeresọlfọ hexafluoride (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) na octafluoropropane (C3F8).

Site na mmepe nke nanotechnology na mmepe buru ibu nke ụlọ ọrụ eletrọniki, ọchịchọ ya ga-abawanye kwa ụbọchị. Nitrogen trifluoride, dị ka gas eletrọniki pụrụ iche dị oke mkpa na nke kachasị ukwuu ejiri mee ihe na mmepụta na nhazi nke panel na semiconductors, nwere oghere ahịa sara mbara.

Dịka ụdị gas pụrụ iche nke nwere fluorine,nitrogen trifluoride (NF3)bụ ngwaahịa gas pụrụ iche eletrọniki nwere ikike ahịa kachasị ukwuu. Ọ na-adịghị arụ ọrụ nke ọma n'ọnọdụ kemịkalụ n'ime ụlọ, ọ na-arụ ọrụ karịa oxygen na okpomọkụ dị elu, ọ na-akwụsi ike karịa fluorine, ọ dịkwa mfe ijikwa. A na-ejikarị Nitrogen trifluoride eme ihe dị ka gas etching plasma na ihe na-ehicha ụlọ mmeghachi omume, ọ dịkwa mma maka ebe mmepụta nke chips semiconductor, ngosipụta panel dị larịị, eriri anya, mkpụrụ ndụ fotovoltaic, wdg.

Ma e jiri ya tụnyere gas eletrọniki ndị ọzọ nwere fluorine,nitrogen trifluoridenwere uru nke mmeghachi omume ngwa ngwa na arụmọrụ dị elu. Karịsịa n'ịkpụcha ihe ndị nwere silicon dị ka silicon nitride, ọ nwere oke mbelata na nhọrọ dị elu, na-ahapụghị ihe fọdụrụ n'elu ihe e ji kpụcha. Ọ bụkwa ezigbo ihe nhicha ma enweghị mmetọ n'elu, nke nwere ike igbo mkpa nke usoro nhazi.