Oke Kachasị Elu nke Gas Pụrụ Iche Elektrọnik - Nitrogen Trifluoride NF3

Ụlọ ọrụ semiconductor na ụlọ ọrụ panel nke mba anyị na-enwe ọganihu dị elu. Nitrogen trifluoride, dị ka gas eletrọniki pụrụ iche dị oke mkpa na nke kachasị ukwuu n'imepụta na nhazi nke panel na semiconductor, nwere ohere ahịa sara mbara.

Gas eletriki pụrụ iche nke nwere fluorine gụnyeresọlfọ hexafluoride (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) na octafluoropropane (C3F8). A na-ejikarị nitrogen trifluoride (NF3) eme ihe dị ka isi iyi fluorine maka hydrogen fluoride-fluoride gas nwere ike dị elu. Akụkụ dị irè (ihe dị ka 25%) nke ike mmeghachi omume dị n'etiti H2-O2 na F2 nwere ike ịpụta site na radieshon laser, yabụ laser HF-OF bụ laser kachasị mma n'etiti laser kemịkalụ.

Nitrogen trifluoride bụ ezigbo gas e ji eme ihe n'ime plasma n'ụlọ ọrụ microelectronics. Maka e ji eme ihe n'ime silicon na silicon nitride, nitrogen trifluoride nwere oke e ji eme ihe na nhọrọ karịa carbon tetrafluoride na ngwakọta nke carbon tetrafluoride na oxygen, ọ nweghịkwa mmetọ n'elu ya. Karịsịa n'ịme ihe ndị e ji eme ihe n'ime sekit nke nwere ọkpụrụkpụ na-erughị 1.5um, nitrogen trifluoride nwere oke e ji eme ihe na nhọrọ dị mma, na-ahapụghị ihe fọdụrụ n'elu ihe e ji eme ihe n'ime ya, ọ bụkwa ezigbo ihe nhicha. Site na mmepe nke nanotechnology na mmepe buru ibu nke ụlọ ọrụ eletrọniki, ọchịchọ ya ga-abawanye kwa ụbọchị.

Dịka ụdị gas pụrụ iche nke nwere fluorine, nitrogen trifluoride (NF3) bụ ngwaahịa gas pụrụ iche kachasị ukwuu n'ahịa. Ọ na-adịghị arụ ọrụ nke ọma n'ime ụlọ okpomọkụ, ọ na-arụ ọrụ karịa oxygen, ọ na-akwụsi ike karịa fluorine, ọ dịkwa mfe ijikwa ya n'oge okpomọkụ dị elu.

A na-ejikarị Nitrogen trifluoride eme ihe dị ka gas etching na ihe nhicha ụlọ mmeghachi omume, nke dabara adaba maka ubi mmepụta ihe dịka chips semiconductor, ngosipụta panel dị larịị, eriri anya, mkpụrụ ndụ fotovoltaic, wdg.

Ma e jiri ya tụnyere gas eletrọniki ndị ọzọ nwere fluorine, nitrogen trifluoride nwere uru nke mmeghachi omume ngwa ngwa na arụmọrụ dị elu, ọkachasị n'ịkpụcha ihe ndị nwere silicon dị ka silicon nitride, ọ nwere oke mbelata na nhọrọ dị elu, na-ahapụghị ihe fọdụrụ n'elu ihe ahụ e ji aka kpụọ, ọ bụkwa ezigbo ihe nhicha, ọ naghịkwa emerụ elu ahụ ma nwee ike igbo mkpa nke usoro nhazi ahụ.