Nnukwu ikuku pụrụ iche - nitrogen trifluoride NF3

Industrylọ ọrụ na-arụ ọrụ na obodo nke obodo anyị na ụlọ ọrụ Sunline na-eme ka ọganihu dị elu. Nitrogen trifluoride, dị ka ihe dị mkpa na mmanụ pụrụ iche na nnukwu nrụpụta na nhazi nke ogwe na semiconductor, nwere ohere ahịa sara mbara.

Na-ejikarị fluorinine nwere ụdị elektrik pụrụ iche gụnyeresulfur hexafluoride (sf6), Tursten Hexafluride (wf6),carbon tetrafluoride (cf4), TrifluouroMane (CHF3), nitrogen trifluoride (NF3), hexafluooatane (c2F6) na octafluoropane (c3F8). A na-ejikarị ya eme ihe (NF3) dị ka isi iyi nke fluogen hydrogen fluaride-fluogen flue-fluen fluy-fluen fluy-fluen fluy-fluen fluy-fluen fluy-fluen fluy-fluen fluy-fluen fluy-fluen fluy-fluen. Akụkụ dị irè (ihe dị ka 25%) nke ike mmeghachi omume dị n'etiti H2-O2 na F2 na F2

Nitrogen trifluoride bụ plasma magburu onwe mma gas na ụlọ ọrụ microlelecry. Maka Etching silicon na silicon nitri, nitrogen trifruoride nwere ọnụego etcheridide nwere uru carbon tetraflioride na oxygen, enweghị mmerụ ọkụ. Karịsịa na etching nke ihe eji eme ihe na-erughị 1.5um, nitrogen trifluoride nwere oke ọnụego na nhọrọ nke ihe etched, ma dịkwa mma na-ebelata. Site na mmepe nke Nanotechnology na nnukwu mmepe nke ụlọ ọrụ elektrọnik, ihe ọ ga-eme kwa ụbọchị.

Dị ka ụdị gas pụrụ iche, nitrogen trifluoride (NF3) bụ ngwaahịa gas pụrụ iche na ahịa. Ọ bụ kemịkal na ụlọ okpomọkụ, na-arụ ọrụ karịa oxygen, kwụsie ike karịa fluorine, ma dị mfe ijikwa okpomọkụ dị elu.

A na-eji nitrogen trifluoride gas gas na mmeghachi omume na-eme mkpọtụ na mmeghachi omume nke ụlọ ọrụ na-arụpụta ihe dị ka semiconductor, na-egosiputa semips, akara aka na-adịghị mma, wdc.

Tụnyere ya na ikuku ndị ọzọ nwere ahụ ọkụ eletriki, nitrogen trifluoride nwere uru mmeghachi omume dị ka Silicon na-eme ka ọ dị elu, ọ na-emekwa ka ọ dị elu, ọ na-anaghị emetọ elu ahụ ma nwee ike izute mkpa nke nhazi.