Hydrogen chloridebụ gas na-enweghị agba na isi ísì. A na-akpọ ngwọta mmiri ya hydrochloric acid, nke a makwaara dị ka hydrochloric acid. Hydrogen chloride na-agbaze nke ukwuu na mmiri. Na 0 Celsius C, 1 olu mmiri nwere ike igbari ihe dị ka mpịakọta 500 nke hydrogen chloride.

Ọ nwere njirimara na njirimara ndị a:

1. Ịdị ọcha dị elu

Ịdị ọcha nke ọkwa eletrọnịkịhydrogen chloridedị elu nke ukwuu, na-adịkarị na ppm ma ọ bụ ọkwa dị ala, iji hụ na ọ dịghị ihe adịghị eme ka ewebata n'ime usoro mmepụta semiconductor.

2. Inertness

Ọ bụ gas inert nke kemịkalụ nke na-adịghị emeghachi omume na ọtụtụ ihe ndị ọzọ, nke dị oke mkpa iji gbochie mmetọ nke ihe ndị na-emepụta ihe na ihe ndị dị na semiconductor.

3. Nkwụsi ike dị elu

Eletrọnịkị ọkwahydrogen chloriden'ozuzu nwere kemịkalụ kwụsiri ike iji hụ na nhazi semiconductor a pụrụ ịdabere na ya.

Na nhazi semiconductor, ngwa bụ isi nke ọkwa elektrọnik hydrogen chloride gụnyere:

1. Nhicha elu na nkwadebe

Dị ka onye na-ehicha elu nke ọma, ọkwa eletrọnịkịhydrogen chloridea na-eji ewepu oxides na ihe ndị na-adịghị ọcha si n'elu ala ahụ iji hụ na ịdị mma na ịdị ọcha nke oyi akwa epitaxial ma ọ bụ ihe nkiri.

2.Epitaxial ibu enyemaka

A na-eji ya dị ka onye na-ahụ maka ọgwụgwọ elu na usoro epitaxial, ọ na-enyere aka melite ogo nke oyi akwa epitaxial, meziwanye njikọ nke lattice, ma belata nhazi nke ntụpọ.

3. Substrate pretreatment

Tupu nkwadebe nke ngwaọrụ semiconductor, ọkwa eletrọnịkịhydrogen chlorideenwere ike iji gwọọ elu ala ka ọ bụrụ ntọala kwụsiri ike iji mee ka mmachi dị n'etiti oyi akwa epitaxial na mkpụrụ.

4. Deposition onye enyemaka inyeaka

Na usoro nke kemịkalụ vapor deposition (CVD) ma ọ bụ anụ ahụ vapor deposition (PVD), eletrọnịkị ọkwa hydrogen chloride nwere ike iji dị ka a gas na-enyefe usoro isonye na ntinye mmeghachi omume nke semiconductor ihe.

5. Onye na-enyefefe gas-phase

Dị ka onye na-enyefe gas na-ebufe gas, a na-ebute ihe ndị ọzọ na-emepụta gas n'ime ụlọ mmeghachi omume iji nyere aka dozie ọnụego nkwụnye ego na otu ihe ahụ.

Njirimara ndị a na-eme ka ọkwa eletrọnịkịhydrogen chlorideonye ọrụ nhazi dị mkpa na teknụzụ semiconductor, nke nwere mmetụta dị mkpa na arụmọrụ na ntụkwasị obi nke ngwaọrụ ikpeazụ.

Na mgbakwunye na iji ya na nhazi semiconductor, ọkwa eletrọnịkị hydrogen chloride nwere ike ịchọta ihe dị iche iche eji eme ihe na mpaghara ndị ọzọ, gụnyere: Nkwadebe nke ihe dị ọcha dị elu, mmanụ mmanụ, mmepụta ihe Semiconductor, Vapor Phase Lithography, Analysis Material, Chemical Research.

N'ozuzu, eletrọnịkị ọkwahydrogen chloridebụ ihe dị iche iche, gas dị ọcha dị elu nke nwere ọtụtụ ngwa na-abụghị nke nrụpụta semiconductor.