Gas pụrụ ichedị iche na izugbegas ụlọ ọrụ mmepụta ihen'ihi na ha nwere ojiji pụrụ iche ma a na-etinye ha n'ọrụ n'ọhịa ụfọdụ. Ha nwere ihe achọrọ kpọmkwem maka ịdị ọcha, ọdịnaya adịghị ọcha, ihe mejupụtara ya, na ihe onwunwe anụ ahụ na kemịkalụ. Ma e jiri ya tụnyere gas ụlọ ọrụ mmepụta ihe, gas pụrụ iche dị iche iche karịa mana ha nwere obere mmepụta na ire ere.

Ihegas agwakọtara agwakọtanagas nhazi ọkọlọtọAnyị na-ejikarị eme ihe bụ akụkụ dị mkpa nke gas pụrụ iche. A na-ekewakarị gas ngwakọta n'ime gas ngwakọta izugbe na gas ngwakọta eletrọniki.

Gas ndị a gwakọtara agwakọta gụnyere:gas agwakọta laser, nchọpụta ngwa ọgụ gas, ịgbado ọkụ gas, nchekwa gas agwakọtara, isi iyi ọkụ eletrik gas agwakọtara, nyocha ahụike na bayoloji gas agwakọtara, ọgwụ mgbochi na ịgbaze gas agwakọtara, gas agwakọtara mkpu ngwa ọgụ, gas agwakọtara ọkụ, gas agwakọtara ọkụ dị elu, na ikuku efu.

Ngwakọta gas eletrọniki gụnyere ngwakọta gas epitaxial, ngwakọta gas kemịkalụ nke na-etinye anwụrụ ọkụ, ngwakọta gas doping, ngwakọta gas etching, na ngwakọta gas eletrọniki ndị ọzọ. Ngwakọta gas ndị a na-arụ ọrụ dị oke mkpa na ụlọ ọrụ semiconductor na microelectronics ma ejiri ha mee ihe nke ukwuu na mmepụta sekit integrated buru ibu (LSI) na sekit integrated buru ibu (VLSI), yana na mmepụta ngwaọrụ semiconductor.

Ụdị gas agwakọta eletrọniki ise bụ nke a na-ejikarị eme ihe

Ngwakọta gas dị iche iche na-eme doping

N'imepụta ngwaọrụ semiconductor na sekit agbakọtara, a na-etinye ụfọdụ ihe na-adịghị ọcha n'ime ihe semiconductor iji nye ike na iguzogide achọrọ, na-eme ka mmepụta nke resistors, njikọ PN, oyi akwa e liri n'ala, na ihe ndị ọzọ. A na-akpọ gas ndị e ji eme doping gas dopant. A na-akpọ gas ndị a karịsịa arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, na diborane. A na-agwakọta isi iyi dopant ahụ na gas ebu (dị ka argon na nitrogen) n'ime kabọd isi iyi. Mgbe ahụ, a na-agbanye gas agwakọtara ahụ n'ime ọkụ mgbasa ozi mgbe niile ma na-agbagharị gburugburu wafer ahụ, na-etinye dopant ahụ n'elu wafer ahụ. Dopant ahụ na-emeghachi omume na silicon iji mepụta ígwè dopant nke na-abanye na silicon ahụ.

Ngwakọta gas uto epitaxial

Uto Epitaxial bụ usoro nke itinye ma zụlite otu ihe kristal n'elu ala ihe mejupụtara ya. N'ime ụlọ ọrụ semiconductor, a na-akpọ gas ndị e ji eto otu ma ọ bụ karịa oyi akwa nke ihe eji eme ihe site na iji kemịkalụ vapor deposition (CVD) na ihe e ji nlezianya họrọ, gas epitaxial. A na-ejikarị gas silicon epitaxial eme ihe gụnyere dihydrogen dichlorosilane, silicon tetrachloride, na silane. A na-ejikarị ha eme ihe maka epitaxial silicon deposition, polycrystalline silicon deposition, silicon oxide film deposition, silicon nitride film deposition, na amorphous silicon film deposition maka mkpụrụ ndụ anyanwụ na ngwaọrụ ndị ọzọ na-emetụta foto.

gas ntinye ion

N'ihe gbasara ngwaọrụ semiconductor na mmepụta sekit agbakwunyere, a na-akpọ gas ndị e ji eme ihe n'usoro itinye ion gas n'ime ihe ndị a na-akpọ ion gas. A na-eme ka ihe ndị na-adịghị ọcha (dịka boron, phosphorus, na arsenic ions) dị ngwa ngwa ruo n'ọkwa ike dị elu tupu e tinye ha n'ime ihe ndị a na-etinye n'ime ihe ndị a. A na-ejikarị teknụzụ itinye ion eme ihe iji chịkwaa voltaji oke. Enwere ike ịchọpụta oke ihe ndị na-adịghị ọcha etinyere n'ihe ndị a na-etinye site n'ịtụle ọkụ eletrik ion. Gas itinye ion na-agụnyekarị phosphorus, arsenic, na boron gas.

Ịkụpụta gas agwakọtara

Ịkpụcha ihe bụ usoro nke ịchacha ihe e ji ewepụ elu e ji arụ ọrụ (dịka ihe nkiri ígwè, ihe nkiri silicon oxide, wdg) n'elu ihe mkpuchi ahụ nke onye na-egbochi ihe na-anaghị ekpuchi, ebe a na-echekwa ebe onye na-egbochi ihe na-ekpuchi ihe na-ekpuchi ihe, ka o wee nweta usoro onyonyo achọrọ n'elu ihe mkpuchi ahụ.

Ngwakọta Gas nke Na-ewepụ Uzuoku Kemịkalụ

Ndobe anwụrụ kemịkalụ (CVD) na-eji ihe ndị na-agbanwe agbanwe etinye otu ihe ma ọ bụ ihe mejupụtara ya site na mmeghachi omume kemịkalụ nke usoro ikuku. Nke a bụ usoro nhazi ihe nkiri nke na-eji mmeghachi omume kemịkalụ nke usoro ikuku. Gas CVD ejiri dị iche iche dabere na ụdị ihe nkiri a na-emepụta.