Epitaxial (uto)Ngwakọta Gas

N'ime ụlọ ọrụ semiconductor, a na-akpọ gas e ji akụ otu ma ọ bụ karịa oyi akwa nke ihe site na itinye anwụrụ kemịkalụ na ihe e ji nlezianya họrọ, gas epitaxial.

A na-ejikarị silicon epitaxial gas eme ihe dịka dichlorosilane, silicon tetrachloride nasilaneA na-ejikarị ya eme ihe maka itinye ihe mkpuchi silikọn epitaxial, itinye ihe mkpuchi silikọn oxide, itinye ihe mkpuchi silikọn nitride, itinye ihe mkpuchi silikọn amorphous maka mkpụrụ ndụ anyanwụ na ndị na-anabata foto ndị ọzọ, wdg. Epitaxy bụ usoro e ji etinye ihe kristal otu ma too n'elu ihe mkpuchi.

Mwepụ Uzuoku Kemịkalụ (CVD) Gas Ngwakọta

CVD bụ ụzọ e si etinye ụfọdụ ihe na ihe ndị mejupụtara site na mmeghachi omume kemịkalụ nke usoro gas site na iji ihe ndị na-agbanwe agbanwe, ya bụ, usoro nhazi ihe nkiri site na iji mmeghachi omume kemịkalụ nke usoro gas. Dabere n'ụdị ihe nkiri e ji mee ihe, gas nke e ji mee ihe dị iche.

Ịṅụ ọgwụ ikeGas agwakọta

N'imepụta ngwaọrụ semiconductor na sekit agbakọtara, a na-etinye ụfọdụ ihe na-adịghị ọcha n'ime ihe semiconductor iji nye ihe ndị ahụ ụdị conductivity achọrọ na ụfọdụ resistive iji mepụta resistors, njikọ PN, oyi akwa e liri n'ala, wdg. A na-akpọ gas eji eme doping gas.

Nke kachasị gụnyere arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, diborane, wdg.

Ọtụtụ mgbe, a na-agwakọta isi iyi ọgwụ ahụ na gas ebu (dị ka argon na nitrogen) n'ime kabinet isi iyi. Mgbe agwakọtara ya, a na-agbanye gas ahụ mgbe niile n'ime ọkụ mgbasa ozi ma gbaa wafer ahụ gburugburu, na-etinye dopants n'elu wafer ahụ, wee meghachi omume na silicon iji mepụta ọla ndị a dọtara adọka nke na-abanye na silicon.

Ịkpụcha iheNgwakọta Gas

Ịkpụcha ihe bụ iji wepụ elu nhazi (dịka ihe nkiri ígwè, ihe nkiri silicon oxide, wdg) n'elu ihe mkpuchi ahụ na-enweghị ihe mkpuchi photoresist, ebe a na-echekwa mpaghara ahụ site na iji ihe mkpuchi photoresist, ka o wee nweta usoro onyonyo achọrọ na elu ihe mkpuchi ahụ.

Ụzọ e si akpụ ihe gụnyere ịkpụ ihe dị mmiri mmiri na ịkpụ ihe dị mmiri mmiri. A na-akpọ gas e ji akpụ ihe dị mmiri mmiri.

A na-ejikarị gas etching eme ihe dị ka fluoride (halide), dịka ọmụmaatụcarbon tetrafluoride, nitrogen trifluoride, trifluoromethane, hexafluoroethane, perfluoropropane, wdg.