Epitaxial (eto)Ngwakọta Gas

N'ụlọ ọrụ semiconductor, gas a na-eji tolite otu ma ọ bụ karịa n'ígwé site na uzuoku kemịkalụ na mkpụrụ nke ahọpụtara nke ọma ka a na-akpọ gas epitaxial.

Gases epitaxial silicon nke a na-ejikarị gụnyere dichlorosilane, silicon tetrachloride nasilane. A na-ejikarị eme ihe maka ntinye silicon nke epitaxial, ntinye ihe nkiri silicon oxide, ntinye ihe nkiri silicon nitride, ntinye ihe nkiri silicon amorphous maka mkpụrụ ndụ anyanwụ na ndị ọzọ na-ese foto, wdg.

Ngwakọta ikuku nke kemịkalụ (CVD) Ngwakọta gas

CVD bụ usoro a na-etinye ụfọdụ ihe na ogige site na mmeghachi omume kemịkalụ nke gas na-eji ogige ndị na-agbanwe agbanwe, ya bụ, usoro imepụta fim site na iji mmeghachi omume kemịkalụ akụkụ gas. Dabere n'ụdị ihe nkiri a na-emepụta, ikuku kemịkalụ vapor deposition (CVD) nke ejiri mee ihe dịkwa iche.

DopingNgwakọta gas

Na mmepụta nke semiconductor ngwaọrụ na integrated sekit, ụfọdụ adịghị na-doped n'ime semiconductor ihe na-enye ihe ndị chọrọ conductivity ụdị na a ụfọdụ resistivity na-emepụta resistors, PN junctions, lie n'ígwé, wdg The gas na-eji na doping usoro a na-akpọ doping gas.

Nke kachasị gụnyere arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, diborane, wdg.

Ọtụtụ mgbe, a na-agwakọta isi iyi doping na gas na-ebu (dị ka argon na nitrogen) na kọbọd isi iyi. Mgbe agwakọtachara, a na-agbanye gas gas na-aga n'ihu n'ime ọkụ na-agbasa ma na-agba gburugburu wafer ahụ, na-etinye dopants n'elu wafer, wee na-emeghachi ihe na silicon iji mepụta ọla doped nke na-akwaga na silicon.

EtchingNgwakọta gas

Etching bụ ikpochapụ elu nhazi (dị ka ihe nkiri igwe, ihe nkiri silicon oxide, wdg) na mkpụrụ na-enweghị fotoresis masking, ebe a na-echekwa ebe ahụ na masking photoresist, iji nweta ụkpụrụ onyonyo achọrọ n'elu ala.

Ụzọ etching gụnyere mmiri mmiri etching kemịkalụ na akọrọ kemịkal etching. A na-akpọ gas etching nke a na-eji eme ihe n'ime mmiri ọgwụ kpọrọ nkụ.

Gas na-apụ apụ na-abụkarị fluoride gas (halide), dị kacarbon tetrafluoride, nitrogen trifluoride, trifluoromethane, hexafluoroethane, perfluoropropane, wdg.