Epitaxial (uto)Agwakọta gas

Na ụlọ ọrụ semiconductor, gas na-eto otu ihe ma ọ bụ karịa nke ihe eji etinye ya site na itinye ego na kemịkalụ nke a na-akpọkarị mkpụrụ ahọpụtara.

A na-ejikarị silion Epitaxals gụnyere Dichlorosilane, silicon tetrachloride nasilone. Ihe eji eme ihe maka Epiticon Epicon, silicon mifide ihe nkiri, silicon nitrictions na-etinye ihe nkiri maka mkpụrụ ndụ anyanwụ na ndị ọzọ na-edobe ihe na-edobe ya na elu nke mkpụrụ osisi.

Kemịkalụ na-akwụnye (CVD)

CVD bụ usoro idobe ihe ụfọdụ na - etinye na kemịkal ikuku site na iji ogige na - agbanwe agbanwe, ya bụ, usoro ihe nkiri na - eji mmeghachi ahụ kemịkal gas. Dabere n'ụdị ihe nkiri guzobere, ihe mkpuchi mmiri vapor (CVD) ejiri dịkwa iche.

DongGas agwa

Na imepụta ngwaọrụ Semiconductor na ngwaọrụ mgbakọ, a na-agbanye ọtụtụ ihe na-egbochi ihe na-eguzogide ihe dị iche iche chọrọ, wdg na-akpọ gas na-adọkpụ.

Nke kachasị gụnyere arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trufluoride, Diborune, wdg.

Ọtụtụ mgbe, a na-agwakọta na gas gas (dika Archion na nitrogen) na palọ Insbịa. Mgbe agwakọta, a na-agbanye mmiri ikuku na-aga n'ihu na-efe efe na mmiri dị iche iche, na-etinyekwa silicon iji mee ka ndị na-agbaze si silicon mee ihe.

EtchingNgwakọta gas

Etcheng bụ itcheta elu nhazi (dị ka ihe nkiri metal, siliconxide ifuru na-enweghị isi okwu na-enweghị atụ na-enweghị atụmanya achọrọ na mkpụrụ.

Uzo eji eme mmiri na-agụnye mmiri kemịkal etching na akọrọ kemịkalụ etching. A na-akpọ gas na mmiri akọrọ etching ettang a na-akpọ Etchings.

Echuling gas na-abụkarị gas fluoride (na-akwụsị), dị kacarbon tetrafluoride, nitrogen trifluoride, trifluoomhane, hexafluooathane, perluopopane, with.