Boron trichloride (BCl3)bụ ihe na-adịghị arụ ọrụ nke ọma n'ime usoro etching dry etching na chemical vapor deposition (CVD) na mmepụta semiconductor. Ọ bụ gas na-enweghị agba nwere isi siri ike na okpomọkụ ụlọ ma na-enwe mmetụta maka ikuku mmiri mmiri n'ihi na ọ na-amịpụta hydrolyzes iji mepụta hydrochloric acid na boric acid.

Ngwa nke Boron Trichloride

N'ime ụlọ ọrụ semiconductor,Boron trichlorideA na-ejikarị ya eme ihe maka ịkpụ aluminom kpọrọ nkụ ma bụrụkwa ihe e ji etinye ihe n'ime ya iji mepụta mpaghara P na wafer silicon. A pụkwara iji ya mee ihe dịka GaAs, Si, AlN, na dịka isi iyi boron n'ọtụtụ ngwa. Na mgbakwunye, a na-eji Boron trichloride eme ihe nke ukwuu na nhazi ígwè, ụlọ ọrụ iko, nyocha kemịkalụ na nyocha ụlọ nyocha.

Nchekwa nke Boron Trichloride

Boron trichlorideọ na-emebi ihe ma na-egbu egbu, ọ nwekwara ike imebi anya na akpụkpọ ahụ nke ukwuu. Ọ na-amịpụta mmiri n'ime ikuku mmiri iji wepụta gas hydrogen chloride na-egbu egbu. Ya mere, ọ dị mkpa ka e mee ihe nchekwa kwesịrị ekwesị mgbe a na-ejikwa ya.Boron trichloride, gụnyere iyi uwe nchebe, enyo anya na ihe nchekwa iku ume, na ịrụ ọrụ n'ebe ikuku na-anaghị abanye nke ọma.