Boron trichloride (BCL3)A na-ejikarị ihe ndị dị na mpaghara a na-ejikarị ya akọrọ etching na kemịkalụ vapor (usoro CVD) na semiconductor na-emepụta. Ọ bụ gas na-acha odo odo na-acha odo odo na ụlọ okpomọkụ ma na-enwe mmetụta na-adakwasị iru mmiri ikuku n'ihi na ọ hydrolyzes mepụta hydrochloric acid na boric acid.

Ngwa nke boron trichloride

Na ụlọ ọrụ semiconductor,Boron trichlorideA na-ejikarị maka akọrọ aluminom na dị ka akwa na-etolite mpaghara P-ụdị ụdị P-S-ụdị na Silicon wafers. Enwere ike iji ya mee ihe iji wepụta ihe dịka Gas, si, Aln, yana dịka isi mmalite nke ụlọ ụfọdụ akọwapụtara. Na mgbakwunye, boron trichloride bụ ebe a na-eji ọtụtụ ebe nhazi, ụlọ ọrụ na-eme ihe iko, nyocha kemịkalụ na nyocha ụlọ nyocha.

Nchekwa nke boron trichloride

Boron trichloridebụ corrosive na nsi na-egbu egbu ma nwee ike ibute oke anya n'anya na anụ ahụ. Ọ hydrolyzes na ikuku ikuku iji hapụ mmanụ ọkụ na-egbu egbu. Ya mere, ihe kwesịrị ekwesị kwesịrị iwere mgbe njikwaBoron trichloride, gụnyere iyi akwa nchebe, agggles na akụrụngwa nchebe, ma na-arụ ọrụ na gburugburu ventilated.