Igwe CF4 nke dị ọcha nke China maka ụlọ ọrụ Semiconductor na-ere ọkụ

Nkọwa Dị Mkpirikpi:


Nkọwa Ngwaahịa

Akara Ngwaahịa

Anyị na-eme mmụọ anyị mgbe niile nke "Ihe ọhụrụ na-eweta ọganihu, na-eme ka ihe dị ndụ dị mma, na-erite uru n'ahịa nchịkwa, akara kredit na-adọta ndị ahịa maka ire ọkụ China High Purity Carbon Tetrafluoride CF4 Gas maka Semiconductor Industry Etching, Anyị na-anabata ndị enyi sitere na ụdị ndụ niile kwa ụbọchị iji chọọ mmekorita ma wuo echi mara mma ma mara mma.
Anyị na-eme mmụọ anyị mgbe niile nke "Ihe ọhụrụ na-eweta ọganihu, ịdị mma dị elu na-eme ka ihe dị ndụ dị mma, uru ahịa nchịkwa, akara kredit na-adọta ndị ahịa makaGas friji nke China CF4, Silinda GasAnyị bụ onye mmekọ gị a pụrụ ịtụkwasị obi n'ahịa mba ụwa nwere ngwaahịa kacha mma. Uru anyị bụ imepụta ihe ọhụrụ, mgbanwe na ntụkwasị obi nke e wuru n'ime afọ iri abụọ gara aga. Anyị na-elekwasị anya n'inye ndị ahịa anyị ọrụ dị ka ihe dị mkpa n'ime ka mmekọrịta anyị na-adịte aka sikwuo ike. Anyị na-enweta ngwọta dị elu mgbe niile yana ọrụ anyị dị mma tupu ere ahịa na mgbe erechara ahịa na-eme ka asọmpi siri ike na ahịa ụwa na-abawanye ụba.

Usoro Nkà na ụzụ

Nkọwapụta 99.999%
Oxygen+Argon ≤1ppm
Nitrogen ≤4 ppm
Mmiri mmiri (H2O) ≤3 ppm
HF ≤0.1 ppm
CO ≤0.1 ppm
CO2 ≤1 ppm
SF6 ≤1 ppm
Halocarbynes ≤1 ppm
Ihe na-adịghị ọcha zuru oke ≤10 ppm

Carbon tetrafluoride bụ hydrocarbon a na-akpọ halogenated nwere usoro kemịkalụ CF4. A pụrụ iwere ya dị ka hydrocarbon a na-akpọ halogenated, methane a na-akpọ halogenated, perfluorocarbon, ma ọ bụ dị ka ihe na-adịghị emepụta ihe. Carbon tetrafluoride bụ gas na-enweghị agba na isi, nke na-adịghị agbaze na mmiri, nke a na-agbaze na benzene na chloroform. Ọ na-adị mma n'okpuru okpomọkụ na nrụgide nkịtị, zere ihe ndị na-eme ka oxidants sie ike, ihe ndị na-ere ọkụ ma ọ bụ ihe ndị na-ere ọkụ. Gas na-anaghị ere ọkụ, nrụgide dị n'ime nke akpa ahụ ga-abawanye mgbe a na-ekpughe ya na okpomọkụ dị elu, enwerekwa ihe ize ndụ nke mgbawa na mgbawa. Ọ kwụsiri ike na kemịkalụ ma ghara ire ọkụ. Naanị ihe na-eme ka ammonia-sodium metal dị mmiri mmiri nwere ike ịrụ ọrụ na okpomọkụ ụlọ. Carbon tetrafluoride bụ gas nke na-akpata mmetụta griinhaus. Ọ kwụsiri ike nke ukwuu, ọ nwere ike ịnọ n'ikuku ruo ogologo oge, ọ bụkwa gas griinhaus dị ike nke ukwuu. A na-eji carbon tetrafluoride eme ihe na usoro nhazi plasma nke sekit dị iche iche agbakwunyere. A na-ejikwa ya dị ka gas laser, a na-ejikwa ya eme ihe na refrijerant dị obere okpomọkụ, ihe mgbaze, mmanụ, ihe mkpuchi, na ihe oyi maka ihe nchọpụta infrared. Ọ bụ gas plasma etching kacha eji eme ihe na ụlọ ọrụ microelectronics. Ọ bụ ngwakọta nke gas dị ọcha tetrafluoromethane na gas dị ọcha tetrafluoromethane na oxygen dị ọcha. Enwere ike iji ya mee ihe nke ukwuu na silicon, silicon dioxide, silicon nitride, na iko phosphosilicate. A na-ejikwa ihe nkiri dị gịrịgịrị dị ka tungsten na tungsten eme ihe nke ukwuu na nhicha elu nke ngwaọrụ eletrọnịkị, mmepụta sel anyanwụ, teknụzụ laser, friji dị ala, nyocha mmiri, na ihe nhicha na mmepụta sekit ebipụtara. Ejiri ya dị ka refrigerant dị ala na teknụzụ akọrọ plasma maka sekit agbakwunyere. Ihe Ndị A Na-akpachara Anya Maka Nchekwa: Debe n'ụlọ nkwakọba gas dị jụụ, nke ikuku na-anaghị ere ọkụ. Debe ya ebe ọkụ na ebe okpomọkụ na-esi. Okpomọkụ nchekwa ekwesịghị ịgafe 30°C. A ga-echekwa ya iche iche site na ihe ndị na-ere ọkụ (ndị nwere ike ire ere) na ihe ndị na-eme ka ọ ghara ire ọkụ, ma zere ebe a na-echekwa ihe dị iche iche. Ebe a na-echekwa ihe kwesịrị inwe ngwa ọgwụgwọ mberede nke na-agbapụta mmiri.

Ngwa:

① Ihe na-eme ka friji dị jụụ:

A na-eji Tetrafluoromethane eme ihe mgbe ụfọdụ dị ka ihe na-eme ka ọ dị obere okpomọkụ.

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② Ịkpụcha ihe:

A na-eji ya eme ihe n'ikpo ihe eji emepụta ihe n'igwe eletriki naanị ya ma ọ bụ na njikọta ya na oxygen dị ka ihe e ji etinye ihe n'ime plasma maka silicon, silicon dioxide, na silicon nitride.

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Ngwugwu nkịtị:

Ngwaahịa Carbon Tetrafluoride CF4
Nha ngwugwu Silinda 40Ltr Silinda 50Ltr  
Ijuputa ibu arọ/silinda 30Kg 38Kg  
Ọnụọgụ Ebugoro n'ime akpa 20' Sil 250 Sil 250
Mkpokọta Ibu Net Tọn 7.5 Tọn 9.5
Ibu Silinda Tare 50Kgs 55Kgs
Valvụ CGA 580

Uru:

①Ịdị ọcha dị elu, ụlọ ọrụ kachasị ọhụrụ;

②Onye nrụpụta asambodo ISO;

③Nnyefe ngwa ngwa;

④ Sistemụ nyocha n'ịntanetị maka njikwa mma na nzọụkwụ ọ bụla;

⑤Nchọ dị elu na usoro nlezianya maka ijikwa silinda tupu ejuputa ya;Anyị na-eme mmụọ anyị mgbe niile nke "Ihe ọhụrụ na-eweta ọganihu, na-eme ka ihe dị ndụ dị mma, na-erite uru n'ahịa nchịkwa, akara kredit na-adọta ndị ahịa maka ire ọkụ China High Purity Carbon Tetrafluoride CF4 Gas maka Semiconductor Industry Etching, Anyị na-anabata ndị enyi sitere na ụdị ndụ niile kwa ụbọchị iji chọọ mmekorita ma wuo echi mara mma ma mara mma.
Na-ere ọkụGas friji nke China CF4, Silinda GasAnyị bụ onye mmekọ gị a pụrụ ịtụkwasị obi n'ahịa mba ụwa nwere ngwaahịa kacha mma. Uru anyị bụ imepụta ihe ọhụrụ, mgbanwe na ntụkwasị obi nke e wuru n'ime afọ iri abụọ gara aga. Anyị na-elekwasị anya n'inye ndị ahịa anyị ọrụ dị ka ihe dị mkpa n'ime ka mmekọrịta anyị na-adịte aka sikwuo ike. Anyị na-enweta ngwọta dị elu mgbe niile yana ọrụ anyị dị mma tupu ere ahịa na mgbe erechara ahịa na-eme ka asọmpi siri ike na ahịa ụwa na-abawanye ụba.


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